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US Patent 8328939 Diffuser plate with slit valve compensation

Patent 8328939 was granted and assigned to Applied Materials on December, 2012 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

83289390

Patent Inventor Names

John M. White0

Soo Young Choi0

Date of Patent

December 11, 2012

Patent Application Number

117804780

Date Filed

July 20, 2007

Patent Citations Received

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US Patent 12116669 Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

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US Patent 11915950 Multi-zone semiconductor substrate supports

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US Patent 12000047 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition

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US Patent 12009228 Low temperature chuck for plasma processing systems

Patent Primary Examiner

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Jeffrie R. Lund

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