Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 8, 2013
Patent Application Number
12856723
Date Filed
August 16, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.
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