US Patent 8372203 Apparatus temperature control and pattern compensation
Patent 8372203 was granted and assigned to Applied Materials on February, 2013 by the United States Patent and Trademark Office.
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Patent abstract
A film formation system 10 includes a processing chamber 15 bounded by sidewalls 18 and a top cover 11. In one embodiment, a susceptor 16 is rotatably disposed in the system 10, and overlaps with a first peripheral member 205 disposed around the sidewalls 18. A radiant heating system 313 is disposed under the susceptor 305 to heat the substrate 19. In another embodiment, the top cover 11 has equally spaced pyrometers 58 for measuring the temperature of the substrate 19 across a number of zones. The temperature of the substrate 19 is obtained from pyrometric data from the pyrometers 58.
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US Patent 08372203 Apparatus temperature control and pattern compensation US Patent 8372203 Apparatus temperature control and pattern compensation
Infobox
Patent Number
0837220300
Patent Number
837220300
Edits on 23 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
083722030
Date of Patent
February 12, 2013
0Patent Application Number
112422990
Date Filed
September 30, 2005
0Patent Primary Examiner
Edits on 28 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
083722030
Date of Patent
February 12, 2013
0Patent Application Number
112422990
Date Filed
September 30, 2005
0Patent Primary Examiner
Edits on 15 Dec, 2021
Golden AI
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US Patent 08372203 Apparatus temperature control and pattern compensation
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08372203
Date of patent
February 12, 2013
Patent application number
11242299
Date Filed
September 30, 2005
Patent primary examiner
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