Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Richard Pickreign0
William Holtkamp0
Christopher Hofmeister0
Izya Kremerman0
Date of Patent
March 19, 2013
0Patent Application Number
114425110
Date Filed
May 26, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A substrate processing apparatus includes a transport chamber capable of holding an isolated atmosphere therein and communicably connected to a charging station for loading and unloading a substrate into the apparatus, a transport system inside the transport chamber for transporting the substrate and an array of processing chamber modules distributed alongside the transport chamber and communicably connected to the transport chamber to allow the substrate to be transferred therebetween.
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