US Patent 8398355 Linearly distributed semiconductor workpiece processing tool
Patent 8398355 was granted and assigned to Brooks Automation on March, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 26, 2006
0
Date of Patent
March 19, 2013
0
Patent Application Number
11442511
0
Patent Inventor Names
Richard Pickreign
0
William Holtkamp
0
Christopher Hofmeister
0
Izya Kremerman
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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