Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brian Evans0
Seshasayee Varadarajan0
Shantinath Ghongadi0
Tariq Majid0
Bryan Buckalew0
Jeff Hawkins0
Kousik Ganesan0
Robert Rash0
Date of Patent
March 19, 2013
0Patent Application Number
130797450
Date Filed
April 4, 2011
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
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