US Patent 8398831 Rapidly cleanable electroplating cup seal
Patent 8398831 was granted and assigned to Novellus Systems on March, 2013 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 4, 2011
0
Date of Patent
March 19, 2013
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Patent Application Number
13079745
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Patent Citations Received
Patent Inventor Names
Brian Evans
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Seshasayee Varadarajan
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Shantinath Ghongadi
0
Tariq Majid
0
Bryan Buckalew
0
Jeff Hawkins
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Kousik Ganesan
0
Robert Rash
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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