Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 26, 2013
Patent Application Number
11681822
Date Filed
March 5, 2007
Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A bypass thermal adjuster, which may be placed between two robots, provides a chamber for isolation and thermal control of wafers while permitting other wafers to be passed through the adjuster by the robots.
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