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US Patent 8403613 Bypass thermal adjuster for vacuum semiconductor processing

Patent 8403613 was granted and assigned to Brooks Automation on March, 2013 by the United States Patent and Trademark Office.

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US Patent 12129791 Baffled thermoclines in thermodynamic cycle systems
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US Patent 12123347 Pumped heat energy storage system with load following
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US Patent 12123327 Pumped heat energy storage system with modular turbomachinery
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US Patent 12080571 Substrate processing module and method of moving a workpiece
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US Patent 11982228 Pumped heat energy storage system with steam cycle
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US Patent 11927130 Pump control of closed cycle power generation system
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US Patent 11885244 Pumped heat energy storage system with electric heating integration
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US Patent 11852043 Pumped heat electric storage system with recirculation
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US Patent 11840932 Pumped heat energy storage system with generation cycle thermal integration
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Patent abstract

A bypass thermal adjuster, which may be placed between two robots, provides a chamber for isolation and thermal control of wafers while permitting other wafers to be passed through the adjuster by the robots.

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US Patent 11761336 Adiabatic salt energy storage
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US Patent 11754319 Pumped thermal storage cycles with turbomachine speed control
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US Patent 08403613 Bypass thermal adjuster for vacuum semiconductor processing US Patent 8403613 Bypass thermal adjuster for vacuum semiconductor processing

Infobox
Patent Number
0840361300
Patent Number
840361300
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Infobox
Is a
Patent
Patent
0
Current Assignee
Brooks Automation
Brooks Automation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
084036130
Date of Patent
March 26, 2013
0
Patent Application Number
116818220
Date Filed
March 5, 2007
0
Patent Primary Examiner
‌
James Keenan
0
Edits on 23 Sep, 2022
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edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Brooks Automation
Brooks Automation
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
084036130
Date of Patent
March 26, 2013
0
Patent Application Number
116818220
Date Filed
March 5, 2007
0
Patent Primary Examiner
‌
James Keenan
0
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created this topic on 16 Dec, 2021
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Infobox (+8 properties)
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 US Patent 08403613 Bypass thermal adjuster for vacuum semiconductor processing

Infobox
Is a
Patent
Patent
Current assignee
Brooks Automation
Brooks Automation
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08403613
Date of patent
March 26, 2013
Patent application number
11681822
Date Filed
March 5, 2007
Patent primary examiner
‌
James Keenan

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