US Patent 8432529 Lithographic apparatus and monitoring method
Is a
Date Filed
June 24, 2010
0
Date of Patent
April 30, 2013
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Patent Application Number
12822447
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Patent Citations Received
Patent Inventor Names
Paul Van Der Veen
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Bert Jan Claessens
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Herman Philip Godfried
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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