Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mohith Verghese0
Ryan M. Schmidt0
Date of Patent
June 18, 2013
Patent Application Number
12398938
Date Filed
March 5, 2009
Patent Citations Received
Patent Primary Examiner
Patent abstract
A system and method for mixing a plurality of gases for an atomic layer deposition (ALD) reactor. The mixer is configured to mix the plurality of gases while minimizing the potential for re-circulation within the mixer. The mixer is further configured to maintain the flow velocity of the plurality of gases as the gases pass through the mixer.
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