Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chao-Wei Lin0
Chih-Yuan Chen0
Hui-Huang Chen0
Date of Patent
June 25, 2013
0Patent Application Number
136588160
Date Filed
October 24, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A novel method for manufacturing a 3-D vertical memory comprising the steps of dividing a multilayer structure composed of insulating intermediate layers and sacrificial intermediate layers into a first multilayer structure and a second multilayer structure, replacing the sacrificial intermediate layers in the multilayer structures with metal intermediate layers, and manufacturing the channel structure in two multilayer structures.
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