US Patent 8475228 Polishing pad with partially recessed window
Patent 8475228 was granted and assigned to Applied Materials on July, 2013 by the United States Patent and Trademark Office.
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Patent abstract
A polishing pad has an opaque polishing layer with an aperture therethrough and a polishing surface, and a solid light-transmissive window in the aperture. The solid light-transmissive window includes an outer portion secured to the polishing layer and an inner portion secured to the outer portion. The outer portion has a upper surface recessed relative to the polishing surface, whereas the inner portion has an upper surface that is substantially co-planar with the polishing surface.
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Patent Inventor Names
Boguslaw A. Swedek0
Dominic J. Benvegnu0
Jimin Zhang0
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Patent Citations Received
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US Patent 08475228 Polishing pad with partially recessed window US Patent 8475228 Polishing pad with partially recessed window
Infobox
Patent Number
084752280
Patent Number
84752280
Edits on 7 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
084752280
Date of Patent
July 2, 2013
0Patent Application Number
131066350
Date Filed
May 12, 2011
0Patent Primary Examiner
Edits on 17 Dec, 2021
Golden AI
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Infobox (+8 properties)
US Patent 08475228 Polishing pad with partially recessed window
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08475228
Date of patent
July 2, 2013
Patent application number
13106635
Date Filed
May 12, 2011
Patent primary examiner
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