Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexei Marakhtanov0
Rajinder Dhindsa0
Michael C. Kellogg0
Date of Patent
July 16, 2013
Patent Application Number
12828120
Date Filed
June 30, 2010
Patent Citations Received
Patent Primary Examiner
Patent abstract
A movable ground ring of a movable substrate support assembly is described. The movable ground ring is configured to fit around and provide an RF return path to a fixed ground ring of the movable substrate support assembly in an adjustable gap capacitively-coupled plasma processing chamber wherein a semiconductor substrate supported in the substrate support assembly undergoes plasma processing.
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