US Patent 8485128 Movable ground ring for a plasma processing chamber
Patent 8485128 was granted and assigned to Lam Research on July, 2013 by the United States Patent and Trademark Office.
All edits
Edits on 3 Jul, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 30 Nov, 2023
Golden AI
Edits made to:
Article (+412 characters)
Article
Patent abstract
A movable ground ring of a movable substrate support assembly is described. The movable ground ring is configured to fit around and provide an RF return path to a fixed ground ring of the movable substrate support assembly in an adjustable gap capacitively-coupled plasma processing chamber wherein a semiconductor substrate supported in the substrate support assembly undergoes plasma processing.
Edits on 22 Sep, 2023
Golden AI
Edits made to:
Infobox (+3 properties)
Infobox
Patent Inventor Names
Alexei Marakhtanov0
Michael C. Kellogg0
Rajinder Dhindsa0
Edits on 7 Jun, 2023
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 24 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 08485128 Movable ground ring for a plasma processing chamber US Patent 8485128 Movable ground ring for a plasma processing chamber
Infobox
Patent Number
08485128
Patent Number
8485128
Edits on 17 Dec, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 08485128 Movable ground ring for a plasma processing chamber
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08485128
Date of patent
July 16, 2013
Patent application number
12828120
Date Filed
June 30, 2010
Patent primary examiner
Find more entities like US Patent 8485128 Movable ground ring for a plasma processing chamber
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
