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US Patent 8610898 Self-referencing interferometer, alignment system, and lithographic apparatus

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

December 17, 2013

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Patent Application Number

132070970

Date Filed

August 10, 2011

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Patent Citations Received

US Patent 11971665 Wafer alignment using form birefringence of targets or product

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US Patent 11841628 Apparatus for and method of sensing alignment marks

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Patent Primary Examiner

Michael A Lyons

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