Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Justin Lloyd Kreuzer0
Krishanu Shome0
Date of Patent
December 12, 2023
0Patent Application Number
177980400
Date Filed
January 21, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
An apparatus for and method of sensing multiple alignment marks in which the optical axis of a detector is divided into multiple axes each of which can essentially simultaneously detect a separate alignment mark to generate a signal which can then be multiplexed and presented to a single detector or multiple detectors thus permitting more rapid detection of multiple marks.
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