Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wen-Chun Huang0
Hung-Chun Wang0
Ming-Hui Chih0
Ru-Gun Liu0
Cheng Kun Tsai0
Date of Patent
January 7, 2014
0Patent Application Number
134478570
Date Filed
April 16, 2012
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present disclosure provides one embodiment of an integrated circuit (IC) method. The method includes receiving an IC design layout having a plurality of IC regions each including an IC pattern; performing a dissection process to the IC design layout; and performing a correction process to the IC design layout using a correction model that includes proximity effect and location effect. The correction process includes performing a first correction step to a first IC region of the IC regions, resulting in a first corrected IC pattern in the first IC region; and performing a second correction step to a second IC region of the IC regions, starting with the first corrected IC pattern, resulting in a second corrected IC pattern.
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