Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kuei-Shun Chen
Chi-Kang Chang
Shih-Chi Fu
Chih-Hsiung Peng
Chung-Ming Wang
Date of Patent
September 5, 2023
Patent Application Number
17229736
Date Filed
April 13, 2021
Patent Citations
...
Patent Primary Examiner
A method includes forming a first mandrel pattern and a second mandrel pattern. The first mandrel pattern includes at least first and second mandrels for a mandrel-spacer double patterning process. The second mandrel pattern includes at least a third mandrel inserted between the first and second mandrels. The first mandrel pattern and the second mandrel pattern include a same material. The first and second mandrels are merged together with the third mandrel to form a single pattern.
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