Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kallol Bera0
Daniel J. Hoffman0
Date of Patent
February 11, 2014
Patent Application Number
12109332
Date Filed
April 24, 2008
Patent Citations Received
Patent Primary Examiner
Patent abstract
A baffle assembly for an etching apparatus is disclosed. The baffle assembly comprises a ring and a lower baffle portion having a curved wall extending between a flange portion and a lower frame portion. A heating assembly may be present within the lower frame portion to control the temperature of the baffle. The baffle assembly may help confine the plasma within the processing space in the chamber. The ring may comprise silicon carbide and the lower baffle portion may comprise aluminum.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
