US Patent 8647438 Annular baffle
Patent 8647438 was granted and assigned to Applied Materials on February, 2014 by the United States Patent and Trademark Office.
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Patent abstract
A baffle assembly for an etching apparatus is disclosed. The baffle assembly comprises a ring and a lower baffle portion having a curved wall extending between a flange portion and a lower frame portion. A heating assembly may be present within the lower frame portion to control the temperature of the baffle. The baffle assembly may help confine the plasma within the processing space in the chamber. The ring may comprise silicon carbide and the lower baffle portion may comprise aluminum.
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Patent Inventor Names
Daniel J. Hoffman0
Kallol Bera0
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US Patent 08647438 Annular baffle US Patent 8647438 Annular baffle
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Patent Number
08647438
Patent Number
8647438
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Official Website
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US Patent 08647438 Annular baffle
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Is a
Current assignee
Patent jurisdiction
Patent number
08647438
Date of patent
February 11, 2014
Patent application number
12109332
Date Filed
April 24, 2008
Patent primary examiner
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