US Patent 8652298 Triode reactor design with multiple radiofrequency powers
Patent 8652298 was granted and assigned to Lam Research on February, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 21, 2011
Date of Patent
February 18, 2014
Patent Application Number
13301725
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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