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US Patent 8653843 Temperature control device and temperature control method
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Patent
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Date Filed
October 12, 2011
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Date of Patent
February 18, 2014
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Patent Application Number
13272018
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Patent Citations Received
US Patent 11852678 Multi-input multi-zone thermal control for device testing
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US Patent 11674999 Wafer scale active thermal interposer for device testing
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US Patent 11754620 DUT placement and handling for active thermal interposer device
US Patent 11774492 Test system including active thermal interposer device
US Patent 11841392 Integrated test cell using active thermal interposer (ATI) with parallel socket actuation
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Patent Inventor Names
Tsuyoshi Yamashita
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Masakazu Ando
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Takashi Hashimoto
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Hiroyuki Takahashi
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
8653843
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Patent Primary Examiner
Joshua Benitez Rosario
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