Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Leslie M. Landsberger1
Salman Saed1
Gennadiy Frolov1
Oleg Grudin1
Date of Patent
March 25, 2014
1Patent Application Number
132555791
Date Filed
March 10, 2010
1Patent Citations Received
Patent Primary Examiner
Patent abstract
There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base.
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