US Patent 8677818 Flow sensing device and packaging thereof
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Patent abstract
There is described a flow sensing device having a semiconductor chip with a flow channel integrated therein and a sensing element positioned in the flow channel, and a package base attached to the semiconductor chip and allowing access to the two passage-openings of the flow channel from opposite sides of the package base.
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Patent Inventor Names
Gennadiy Frolov0
Leslie M. Landsberger0
Oleg Grudin0
Salman Saed0
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US Patent 08677818 Flow sensing device and packaging thereof US Patent 8677818 Flow sensing device and packaging thereof
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Patent Number
086778180
Patent Number
86778180
Edits on 28 Mar, 2023
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Patent Jurisdiction
Patent Number
086778180
Date of Patent
March 25, 2014
0Patent Application Number
132555790
Date Filed
March 10, 2010
0Official Website
Patent Primary Examiner
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US Patent 08677818 Flow sensing device and packaging thereof
Infobox
Is a
Patent jurisdiction
Patent number
08677818
Date of patent
March 25, 2014
Patent application number
13255579
Date Filed
March 10, 2010
Patent primary examiner
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