US Patent 8741394 In-situ deposition of film stacks
Is a
Date Filed
December 16, 2010
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Date of Patent
June 3, 2014
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Patent Application Number
12970846
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Patent Inventor Names
George Andrew Antonelli
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Bart van Schravendijk
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Dong Niu
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Mandyam Sriram
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Patrick Breiling
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Pramod Subramonium
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Jason Haverkamp
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Jennifer O'Loughlin
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Joe Womack
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John Alexy
0
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Patent Jurisdiction
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