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US Patent 8762900 Method for proximity correction

Overview Structured Data Issues Contributors Activity

Is a

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Inventor Names

Hua-Tai Lin0

Burn Jeng Lin0

Jaw-Jung Shin0

Shy-Jay Lin0

Date of Patent

June 24, 2014

Patent Application Number

13534765

Date Filed

June 27, 2012

Patent Citations Received

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US Patent 11914288 Photomask having recessed region

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