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US Patent 8765653 Formulations and method for post-CMP cleaning

Patent 8765653 was granted and assigned to AIR PRODUCTS AND CHEMICALS, INC. on July, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

87656530

Patent Inventor Names

Dnyanesh Chandrakant Tamboli0

Keith Randolph Fabregas0

Madhukar Bhaskara Rao0

Gautam Banerjee0

Date of Patent

July 1, 2014

Patent Application Number

127979030

Date Filed

June 10, 2010

Patent Citations Received

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US Patent 12077730 Quaternary ammonium hydroxides of polyamines

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US Patent 11851638 Surface treatment composition, method for producing surface treatment composition, surface treatment method, and method for producing semiconductor substrate

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US Patent 11905491 Post CMP cleaning compositions

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US Patent 12009222 Method for forming semiconductor device structure

Patent Primary Examiner

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Gregory Webb

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