Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael L. White0
Daniela White0
YoungMin Kim0
Date of Patent
February 20, 2024
0Patent Application Number
174922570
Date Filed
October 1, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
In general, the invention provides high pH cleaning compositions for dielectric surfaces such as PETEOS, SiO
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