US Patent 8796483 Cyclic metal amides and vapor deposition using them

Patent 8796483 was granted and assigned to President and Fellows of Harvard College on August, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

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President and Fellows of Harvard College

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

87964830

Patent Inventor Names

Roy G. Gordon0

Adam S. Hock0

Jaeyeong Heo0

Prasert Sinsermsuksakul0

Date of Patent

August 5, 2014

Patent Application Number

130772410

Date Filed

March 31, 2011

Patent Citations Received

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US Patent 11754924 Organotin oxide hydroxide patterning compositions, precursors, and patterning

Patent Primary Examiner

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Porfirio Nazario-Gonzalez

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