US Patent 8801952 Conformal oxide dry etch
Patent 8801952 was granted and assigned to Applied Materials on August, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 3, 2013
Date of Patent
August 12, 2014
Patent Applicant
Patent Application Number
13908184
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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