US Patent 8809170 High throughput cyclical epitaxial deposition and etch process
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Patent Inventor Names
Matthias Bauer0
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US Patent 08809170 High throughput cyclical epitaxial deposition and etch process US Patent 8809170 High throughput cyclical epitaxial deposition and etch process
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Patent Number
088091700
Patent Number
88091700
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Patent Number
088091700
Date of Patent
August 19, 2014
0Patent Application Number
131119170
Date Filed
May 19, 2011
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US Patent 08809170 High throughput cyclical epitaxial deposition and etch process
Infobox
Is a
Patent jurisdiction
Patent number
08809170
Date of patent
August 19, 2014
Patent application number
13111917
Date Filed
May 19, 2011
Patent primary examiner
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