US Patent 8815329 Delivered energy compensation during plasma processing

Patent 8815329 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on August, 2014 by the United States Patent and Trademark Office.

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Patent Inventor Names

Darren File0

Milan Ilic0

Date of Patent

August 26, 2014

Patent Application Number

123288310

Date Filed

December 5, 2008

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