US Patent 8815329 Delivered energy compensation during plasma processing
Patent 8815329 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on August, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 5, 2008
0
Date of Patent
August 26, 2014
0
Patent Application Number
12328831
0
Patent Citations Received
Patent Inventor Names
Darren File
0
Milan Ilic
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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