Golden has been acquired by ComplyAdvantage.Read about it here ⟶

‌

US Patent 8889024 Plasma etching method

Patent 8889024 was granted and assigned to Hitachi on November, 2014 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8889024

Patent Inventor Names

Tetsuo Ono0

Mamoru Yakushiji0

Michikazu Morimoto0

Tomoyuki Watanabe0

Date of Patent

November 18, 2014

Patent Application Number

14248844

Date Filed

April 9, 2014

Patent Citations Received

‌

US Patent 12027410 Edge ring arrangement with moveable edge rings

‌

US Patent 12009220 Method for processing workpiece, plasma processing apparatus and semiconductor device

Patent Primary Examiner

‌

Roberts Culbert

No article content yet.

Timeline

No Timeline data yet.

Further Resources

Title

Author

Link

Type

Date

No Further Resources data yet.

References

Find more entities like US Patent 8889024 Plasma etching method

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.

Open Query Tool

Access by API