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US Patent 8896832 Discrete polarization scatterometry

Patent 8896832 was granted and assigned to KLA-Tencor on November, 2014 by the United States Patent and Trademark Office.

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Patent

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Current Assignee

KLA-Tencor

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88968320

Patent Inventor Names

Amnon Manassen0

Alexander Svizher0

Johannes D. de Veer0

Lawrence D. Rotter0

Vladimir Levinski0

Andrew V. Hill0

Daniel Kandel0

David Y. Wang0

...

Date of Patent

November 25, 2014

Patent Application Number

131088920

Date Filed

May 16, 2011

Patent Citations Received

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US Patent 11913874 Optical metrology tool equipped with modulated illumination sources

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US Patent 11933717 Sensitive optical metrology in scanning and static modes

Patent Primary Examiner

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Tarifur Chowdhury

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