US Patent 8896832 Discrete polarization scatterometry
Patent 8896832 was granted and assigned to KLA-Tencor on November, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 16, 2011
0
Date of Patent
November 25, 2014
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Patent Application Number
13108892
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Patent Inventor Names
Amnon Manassen
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Alexander Svizher
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Johannes D. de Veer
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Lawrence D. Rotter
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Vladimir Levinski
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Andrew V. Hill
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Daniel Kandel
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David Y. Wang
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Joel Seligson
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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