US Patent 8933628 Inductively coupled plasma source with phase control
Patent 8933628 was granted and assigned to Applied Materials on January, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 12, 2012
0
Date of Patent
January 13, 2015
0
Patent Applicant
Patent Application Number
13650835
0
Patent Inventor Names
Valentin Todorow
0
Zhigang Chen
0
Samer Banna
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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