US Patent 8945306 Gas supply device
Patent 8945306 was granted and assigned to Tokyo Electron on February, 2015 by the United States Patent and Trademark Office.
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Patent abstract
A gas supply device disposed opposite to a substrate mounted on a loading board in a processing container and supplying a process gas for processing the substrate comprises a top plate member having a recess formed to spread gradually toward the state in order to constitute a gas diffusion space at a position facing the substrate on the loading board, and a gas supply nozzle projecting into the recess from the top thereof and having a plurality of gas supply holes along the circumferential direction of the recess.
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Patent Inventor Names
Einosuke Tsuda0
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US Patent 08945306 Gas supply device US Patent 8945306 Gas supply device
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Patent Number
08945306
Patent Number
8945306
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Official Website
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US Patent 08945306 Gas supply device
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Is a
Current assignee
Patent jurisdiction
Patent number
08945306
Date of patent
February 3, 2015
Patent application number
12857895
Date Filed
August 17, 2010
Patent primary examiner
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