US Patent 8945306 Gas supply device
Patent 8945306 was granted and assigned to Tokyo Electron on February, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 17, 2010
Date of Patent
February 3, 2015
Patent Application Number
12857895
Patent Inventor Names
Einosuke Tsuda
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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