Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marc L. Tarabbia0
Roderick Alan Augur0
Jason Eugene Stephens0
Nader Magdy Hindawy0
Date of Patent
February 3, 2015
0Patent Application Number
137842200
Date Filed
March 4, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for forming CA power rails using a three mask decomposition process and the resulting device are provided. Embodiments include forming a horizontal diffusion CA power rail in an active layer of a semiconductor substrate using a first color mask; forming a plurality of vertical CAs in the active layer using second and third color masks, the vertical CAs connecting the CA power rail to at least one diffusion region on the semiconductor substrate, spaced from the CA power rail, wherein each pair of CAs formed by one of the second and third color masks are separated by at least two pitches.
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