Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chen Zhang0
Heng Wu0
Ruilong Xie0
Junli Wang0
Brent Anderson0
Date of Patent
June 4, 2024
0Patent Application Number
173849080
Date Filed
July 26, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
A semiconductor structure includes a power rail contact at least partially disposed between a first source/drain region of a first vertical fin structure and a second source/drain region of a second vertical fin structure. The power rail contact is in contact with a buried power rail disposed under the first and second vertical fin structures. The power rail contact is in contact with at least one of the first and second source/drain regions. A contact cap is disposed above the power rail contact.
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