US Patent 8956980 Selective etch of silicon nitride
Patent 8956980 was granted and assigned to Applied Materials on February, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 25, 2013
Date of Patent
February 17, 2015
Patent Applicant
Patent Application Number
14089182
Patent Inventor Names
Anchuan Wang
0
Nitin K. Ingle
0
Shankar Venkataraman
0
Zhijun Chen
0
Zihui Li
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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