Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthew J. McLellan0
Richard M. Blank0
Date of Patent
February 24, 2015
0Patent Application Number
137397440
Date Filed
January 11, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive systems and a tri-axial seal to realize independent extension/retraction of each arm and overall simultaneous rotation of the arm assembly. The robot may provide enhanced throughput efficiency over other robot designs.
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