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US Patent 8961099 Dual arm vacuum robot with common drive pulley

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Patent Citations Received
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US Patent 11894252 Substrate transport apparatus
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Edits on 3 Dec, 2023
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Patent abstract

A robot for use in semiconductor vacuum chambers is disclosed. The robot may include two independently-driven arms configured for wafer handling. The robot may include three motors or drive systems and a tri-axial seal to realize independent extension/retraction of each arm and overall simultaneous rotation of the arm assembly. The robot may provide enhanced throughput efficiency over other robot designs.

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Patent Inventor Names
Matthew J. McLellan0
Richard M. Blank0
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Patent Citations Received
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US Patent 11699610 Rotational indexer with additional rotational axes
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089610990
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US Patent 08961099 Dual arm vacuum robot with common drive pulley US Patent 8961099 Dual arm vacuum robot with common drive pulley

Infobox
Patent Number
089610990
Patent Number
89610990
Edits on 24 Sep, 2022
"Entity importer update"
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edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
089610990
Date of Patent
February 24, 2015
0
Patent Application Number
137397440
Date Filed
January 11, 2013
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089610990
Patent Primary Examiner
‌
Gerald McClain
0
Edits on 15 Jun, 2022
"Entity importer update"
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=08961099
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 US Patent 08961099 Dual arm vacuum robot with common drive pulley

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08961099
Date of patent
February 24, 2015
Patent application number
13739744
Date Filed
January 11, 2013
Patent primary examiner
‌
Gerald McClain

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