US Patent 8987059 MEMS devices and methods of forming same
Is a
Date Filed
August 9, 2012
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Date of Patent
March 24, 2015
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Patent Application Number
13571264
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Patent Inventor Names
Chia-Hua Chu
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Chung-Hsien Lin
0
Jiou-Kang Lee
0
Kai-Chih Liang
0
Te-Hao Lee
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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