US Patent 9005875 Pre-patterned hard mask for ultrafast lithographic imaging
Patent 9005875 was granted and assigned to Intel on April, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 15, 2013
0
Date of Patent
April 14, 2015
0
Patent Applicant
Patent Application Number
13834059
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Patent Inventor Names
Charles H. Wallace
0
Paul A. Nyhus
0
Robert L. Bristol
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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