Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chien-Li Kuo0
Szu-Hao Lai0
Tsai-Yu Wen0
Tsun-Min Cheng0
Chi-Mao Hsu0
Ching-Li Yang0
Ching-Wei Hsu0
Huei-Ru Tsai0
...
Date of Patent
April 21, 2015
Patent Application Number
13593517
Date Filed
August 24, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
A through silicon via process includes the following steps. A substrate having a front side and a back side is provided. A passivation layer is formed on the back side of the substrate. An oxide layer is formed on the passivation layer.
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