US Patent 9017526 Ion beam etching system
Patent 9017526 was granted and assigned to Lam Research on April, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 8, 2013
0
Date of Patent
April 28, 2015
0
Patent Applicant
Patent Application Number
13936930
0
Patent Citations Received
Patent Inventor Names
Alex Paterson
0
Harmeet Singh
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 9017526 Ion beam etching system
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
