US Patent 9023584 Radiation-sensitive composition, and compound
Patent 9023584 was granted and assigned to JSR Corporation on May, 2015 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 24, 2013
0
Date of Patent
May 5, 2015
0
Patent Applicant
Patent Application Number
13901621
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Patent Citations Received
Patent Inventor Names
Ken Maruyama
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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